Microelectromechanical systems (MEMS) are widely used in everyday applications, such as telecommunications (RF filters), accelerometers, gyroscopes, microphones, ultrasound, and numerous other applications. Current research focuses on developing novel materials, fabrication techniques, actuation mechanisms, and new applications. This talk will give a high-level overview of specific PiezoMEMS applications that are currently being investigated at UNM, and potential research opportunities for graduate or undergraduate students in the area of kinetic energy harvesting, atomizers, and acoustic resonators, biomedical devices, and development of functional materials. 

This talk will highlight key advances made by Dr. Jackson’s team on developing and enhancing thin film piezoelectric material aluminium nitride (AlN). This includes demonstrating significant advances in developing flexible/stretchable piezoelectric materials, as well as highlighting key MEMS applications. Piezo-based MEMS devices is a platform technology that has advanced various applications, including high power density MEMS vibrational energy harvesters (2.5 mW/cm³), ultra-efficient atomizers, high Q-factor acoustic resonators, ultra-sensitive sensors, and biomimetic microneedles. The presentation will focus on challenges associated with energy harvesters (bandwidth and power), as well as research opportunities to join Dr. Jackson’s group. The talk will also discuss future functional materials and their potential use in MEMS applications. 

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